SAS Optical Dryer

 

 

 



 

 

 The SAS Optical Dryers are unique dryer systems which are used in drying wafers, disks as well as electronic parts. The SAS Optical Dryers are the only available commercial systems in the market to be used for drying fragile high dense electronic devices especially for very thin fabricated wafers or disks with high deep trenches.
 

The SAS Optical Dryers are designed for permanent replacement of all current available dryers such as Spin-Rinse-Dryers (SRD), Marangoni Dryers, Vacuum Dryer and even Spin Solvent Dryers (SSD). The advantages of SAS Optical Dryers are as follow:

  1. Lack of centrifugal forces (used in SRD and SSD): The SAS Optical Dryers do not rely on high mechanical forces (centrifudual forces), therefore fragile wafers or disks will be protected against breakage during drying process
  2. Non reliance on slow Interface Solvent Dryer process (used in drying wafers or disks with Marangoni effects): Advance technology used in SAS Optical Dryers significantly improves the drying process, resulting processing high number of wafers or disk in a short time.
  3. Low cost and less labors intensive operation of SAS Optical Dryers is another advantage over all commercial existing dryers.
  4. Yielding zero water marks; accepting sample sizes of any size and shape; and compatible price structure to available commercial dryers are other advantages of SAS Optical Dryers.
      
 

Further Details of SAS Optical Dryers:

The SAS Optical Dryers are available in signal or double chambers. These systems are equipped with different cassette holders for 4", 6", 8" as well as 12" wafers. Furthermore, these systems are capable of holding round as well as square samples. The SAS Optical Dryers are available in bench top as well as ground stand system for fabrication facilities with lack of enough clean room space.