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SurfPurge Family Series |
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Description: The main SAS-SurfPurge solutions are SurfPurge10, SurfPurge12 and SurfPurge14. Use of any agitating process such as brushing process or Mega-Sonic system will increase the effectiveness of SAS-SurfPurge solutions. |
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| 1. SurfPurge 10: | ||
| The SAS-SurfPurge10 is usually used for very sensitive pH surfaces. The SAS-SurfPurge10 is an ideal solution for cleaning solar substrate with metal thin film. The SAS-SurfPurge10 is also recommended for the magnetic disk drive technology with NiP as well as aluminum substrate, and Cr/Cr2O3 metal surfaces. | ||
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Dilution: One volume of SubScrub 10 in X volume of water. 0 ≤ X ≤ 100 |
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| 2. SurfPurg 12: | ||
| The SAS-SurfPurge12 is usually used for moderate pH sensitive surfaces. The SAS-SurfPurge12, can easily remove loose as well as chemically bonded particles by undercutting cleaning process. Cleaned samples, after exposure to SurfPurge12, need to be rinsed very well with Di-water or acid rinse. Major application of SAS-SurfPurge12 is in post CMP process. | ||
| 3. SurfPurge 14: | ||
| The SAS-SurfPurge14 is usually used for non-sensitive pH surfaces. The SAS-SurfPurge14, can easily remove chemically bonded particles by undercutting cleaning process. Cleaned samples, after exposure to SurfPurge, need to be rinsed very well with Di-water or acid rinse. Major applications of SAS-SurfPurge14 are in cleaning Silicon/Silica Substrate wafers, Silicon/Silica disks and solar substrate with no metal thin films. | ||
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Dilution: One volume of SurfPurge 14 in X volume of water. 0 ≤ X ≤ 100 |
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Effects of SAS-SurfPurge 14 Solution on Boro Silica Glass (BSG) |
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Benefits:
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