Semiconductor Analystical Services (SAS)- SAS Analytical Service include: Air Sampling (PPM - PPT), Atomic Force Microscopy (AFM), Auger Electron Spectroscopy (AES), Electron Dispersive X-ray (EDX), Electron Spectroscopy for Chemical Analysis (ESCA), F-19 (NMR), Focused Ion Beam (FIB), Fourier Transform Infrared Spectroscopy(FTIR), Gas Chromatography/Mass Spectrometry (GC/MS), High Performance Liquid Chromatography (HPLC), ICP/Mass, Spectrometry (ICP/MS), Ion Chromatography (IC), Liquid Particle Size and Count Measurements (LPC), Raman Spectroscopy, Scanning Electron Microscopy (SEM), SurfScan Particle Count Size & Mapping (SSP), Time-of-Flight Secondary Ion Mass Spectroscopy (TOF), Total Organic Carbon Determination (TOC), Transmission Electron Microscopy (TEM), X-Ray Diffraction (XRD)

AS	Air Sampler			(More detail)
Application
Automatically collect trace of inorganic and organic vapors or airborne particles
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Gas (vapor)	Depends to percentage of the solute (i.e. pollution % in Air)	Depends on the in used chemical absorbing materials.	Chemical Detectable Limit.	Evaluation of cleanroom condition. Environmental pollution. Purity of industrial gas cylinder.
Top of Page
AFM	Atomic Force Microscopy			(More detail)
Application
A standard microscopy technique to visualize and measuring a material's surface structure. Measuring defects in many types of materials, and the coating surface roughness. Also, it provides accurate metrological measurements on optically transparent materials.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid	A "typical" size for the multimode is 8mm ´ 8mm. It depends on the specifics of the "sample holder"	Range from a few nanometers all the way up to tens of microns.	Small scale surface features. Flat sample.	Polymers, ceramics, metals, crystals, and minerals.
Top of Page
AES	Auger Electron Spectroscopy			(More detail)
Application
Identifies the Elemental Composition of the Analyzed Surface
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid	Maximum up to 6" x 6" x 1/4" (W x L x H) [Coated Glass]	Resolution is approximately 0.3 microns.	Sample type must be conductive. Sample must be compatible with High Vacuum environment (1´ 10^-9) Torr. Minimum area of analysis (~ 0.3) microns. Detection limits are approximately 0.1 atom percent	Detection of impurities of semiconductor die or wafer.
Top of Page
EDX	Electron Dispersive X-Ray Spectroscopy			(More detail)
Application
Elemental Analysis or Chemical Characterization of a Sample
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid	It depends on the specifics of the "sample holder"	Many elements will have overlapping peaks. I.e.: Ti , V, Mn , Fe	Cannot detect presence of elements with atomic number less than 5. The X-rays are generated in a region about 2 microns in depth, and thus EDX is not a surface science technique.	Foreign particle analysis, corrosive evaluation, coating composition analysis
Top of Page
ESCA	Electron Spectroscopy for Chemical Analysis			(More detail)
Application
It provides unique information about chemical composition and chemical state of a surface. It can be used for biomaterials.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid (with low vapor pressures)	Between 0.1 and 4.0 cm²	The top 20-50Å of the sample's surface. Spatial resolution with the analysis spot diameter at 300µm (Accuracy of quantitative analysis limited to 3-4 %)	Elements H and He are undetectable.	Determination the composition of monolayer deposition on a thin film substrate. Can analyze both conductors and insulators. Surface analysis tool for studying organics, polymers, and oxides in the semiconductor industry.
Top of Page
NMR	Nuclear Magnetic Resonance Spectroscopy			(More detail)
Application
Probe the nature and characteristics of molecular structure.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Liquid, Solid	5-20 mg is generally sufficient.	For 13C: 10 mg For 1H: 0.1 mg	Sample preparation.	Refinery products and crude oils. Industrial biotech products. The process control. Formulations investigation. Raw materials fingerprinting. Mixture analysis. Sample purity determination. Quantitative analysis. Compound identification and confirmation.
Top of Page
FIB	Focused Ion Beam			(More detail)
Application
It is used for site-specific analysis, deposition, and ablation of materials in the semiconductor and materials science fields.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid	It depends on the specifics of the "sample holder"	The common smallest beam size is 4-6 nm.	Destructive to the specimen. Vacuum compatibility required. Imaging may spoil subsequent analyses. Residual Ga on analytical face.	Sample preparation for SEM, STEM TEM. Etch or machine surfaces. Die surface milling. Patch or modify an existing semiconductor device. FIB secondary electron images are used in corrosion studies. Failure analysis.
Top of Page
FTIR	Fourier Transform Infrared Spectroscopy			(More detail)
Application
It is used to identify organic (and in some cases inorganic) materials.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid, Liquid (anhydrous), Gas	Solid: thin (20–100 micrometer) film. Gas: needs cell with path length typically (5–10 cm.)	Surface sensitivity (typical sampling volumes are ~0.8 µm)	Limited inorganic information. Minimum analysis area: ~15 micron	Characterization of polymer and rubber. Molecular structures. Quantification of O and H in Si, and H in SiN wafers (Si-H vs. N-H)
Top of Page
GC/MS	Gas Chromatography/Mass Spectroscopy			(More detail)
Application
Identification and quantification of volatile organic compounds in complex mixtures. Structural determination of unknown organic compounds.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Volatile Liquid	~ 100 mg	Sensitivity (S/N) is depended on the optimization of instrument.	Sample must either be volatile or capable of derivatization.	Testing the purity of a particular substance. Separating the different components of a mixture. In some situations, identifying a compound.
Top of Page
HPLC	High Performance Liquid Chromatography			(More detail)
Application
Separating and quantifying components in complex liquid mixtures (ranging from small organic and inorganic molecules and ions to polymers and proteins with high molecular weights.)
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Liquid	~ 5 (g or mL)	Depended on the instrument's column.	No universal detector. Less separation efficiency than capillary GC.	Determination of pesticides. Drugs Analysis. Toxicological Analysis. Explosives Analysis.
Top of Page
ICP/MS	Inductively Coupled Plasma/Mass Spectrometry			(More detail)
Application
Determination of a range of metals and several non-metals at concentrations below one part in 1012
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Liquid, solid, Slurry	10-500 micro liters	Nanograms/L	In MS the common matrix elements and other molecular species can interfere with the determination of some elements. The sample to be analyzed must be digested prior to analysis in order to dissolve the element(s) of interest.	Medical, Toxicology, Material Analysis.
Top of Page
IC	Ion Chromatography			(More detail)
Application
It is used for water chemistry (Anions/Cations) analysis
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Liquid	~ 5 mL	Parts-per-billion (ppb) range.	Depends on the Average Detection Limit (ADL)	Water analysis for pollution. Aquatic ecosystems. Contents of food.
Top of Page
LPC	Liquid Particle Counter			(More detail)
Application
It is used to determine the concentration of particles with respect to various sizes which extracted from the contaminated surface of an object.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Aqueous Solution	Variable	~ 0.5 to 60 micrometer	Temporal coincidence of particles in the sensing volume of the LPC. Saturation level or maximum counting rate capability of the electronic sizing. And counting circuitry.	Wafer Cassettes. Magnetic Disks.
Top of Page
	Raman Spectroscopy			(More detail)
Application
It is used for physicochemical analysis (identifying molecules and minerals)
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid; Liquid; Gas	Variable	Depends upon optimized experimental parameters.	The strong background fluorescence in some methods.	The crystallographic orientation of a sample. Pharmaceutical material. Analyzing glass, sapphire, transparent polymers, and diamond.
Top of Page
SEM	Scanning Electron Microscope			(More detail)
Application
Producing information about the sample's surface topography, composition and other properties such as electrical conductivity.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid; Objects with Chemical Fixation.	Depends on specimen stub. Also, a (~ 15 cm) semiconductor wafer holder is present.	Approximately 1 cm to 5 microns in width can be imaged. Spatial resolution of 50 to 100 nm	Conductive materials. Samples must be stable in a vacuum on the order of 10-5 - 10-6 torr. Very light elements (H, He, and Li) are not detectable.	Semiconductor wafer. Crystalline structure of specimens. Examine micro fabric and crystallographic orientation.
Top of Page
SPC	Surface Scanner Particle Counter (SurfScan Particle Counter)			(More detail)
Application
Measuring haze levels which gives information about the micro roughness of an object's (i.e. wafer) surface.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Flat Solid	Variable (~ 200 mm diameter)	~ 0.20 um diameter with 90% detection probability. Haze sensitivity: ~ 0.4 ppm. ~ 50 micrometer space between particles.	Detection limit about 0.12 micrometer.	Measure of the micro roughness of the wafer surface. Measuring the cleanliness of surfaces in a cleanroom.
Top of Page
ToF-SIMS	Time-of-Flight Secondary Ion Mass Spectroscopy			(More detail)
Application
It used in material science disciplines in studies of materials such as polymers, pharmaceuticals, and semi-conductors.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid	From a few mm to 10 cm.	Distinguish elements and molecules with masses ranging from 1 to >10,000 amu. Spatial resolution ~100 nm	Does not produce quantitative analyses. Optical capabilities. Too much data, take hours, days or weeks to fully analyze. Samples must be vacuum compatible.	Study of: Thin Films. Solid-state materials. Ceramics. Polymers. Biological samples. Catalyst particles.
Top of Page
TEM	Transmission Electron Microscopy			(More detail)
Application
Investigative/analytical tool for morphological, visual image and patterns observation
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Solid; Fixated specimen.	Depend on TEM grid sizes. About 2.5 mm. Sample required being at most hundreds of nanometers thick.	Resolution below 0.5 Ångströms (50 pm) /magnifications ~ 50 million times.	Extensive sample preparation. Sample may be damaged by the electron beam.	Material science. Biological materials.
Top of Page
XRD	X-Ray Diffraction			(More detail)
Application
To characterize the structure of crystalline material.
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Metal, Powder	Depends on sample holders and mounting. In general: 20 mm ´ 10 mm ´ 0.3 mm.	Sensitivity depends on the spectrometer and the average atomic number of the sample.	Only work with crystalline materials. Data collection requires long time.	Quality control. Stress analysis of polycrystalline materials (powders). Protein Crystallography.
Top of Page
TOC	Total Organic Carbon Analyzer			(More detail)
Application
Determination of the amount of carbon bound in an organic compound on manufacturing object or solution
State of Sample	Size of Sample	Sensitivity/Accuracy	Limitation	Examples of Use
Liquid (solution)	The typical sample volume collected may vary from 40 mL to 1 L.	About 0.03 ppb to 50 ppm. With accuracy about ± 2%	~ 0.015 mg/L detection limit.	Pharmaceutical manufacturing equipment.
Top of Page

Click to see more info	1.Air Sampling (From PPM to PPT level)
	Using "System Service Innovation" system, model 2000B, capable of air sampling from four different sites simultaneously. The Air Analysis could be applied to:
		Sampling trace of inorganic vapors or airborne materials in cleanrooms (Anions & Cations)
		Evaluating purity of gas cylinders in PPT levels used for sputtering chambers and oxygen free environment
		Sampling trace organic vapors or airborne particles in cleanrooms (acids, bases, and neutral organic compounds)
		Evaluating performance of cleanroom filters for efficiency of trapping organic and inorganic trace contaminant
		Outside air sampling for monitoring environmental pollution, and agricultural pesticide
		Outside air sampling for regulatory compliance and health service
		Chemical manufacturing and petroleum industry

	2. Atomic Force Microscopy (AFM)
	Three dimensional images of surfaces for measurement of:
		Surface roughness
		Grain size
		Grain distribution

	7. Focused Ion Beam (FIB)
	Using Ga liquid metal ion beam
		FIB Cross Sectioning
		FIB Critical Dimension (CD) Measurement
		FIB on-chip Circuit modification (repair, device isolation, & etc...)

	8. Fourier Transform Infrared Spectroscopy (FTIR)
	Using model Nicolet550 series 2 connected to a microscope
		Surface contaminations
		Ratio of CH:CF bonds
		Silicone
		Identification of Trace Contaminants

	9. Gas Chromatography/Mass Spectrometry (GC/MS)
	Using HP 5970B/5965B
		Analyzing trace of organic compounds for the semiconductor industry
		Analyzing trace of organic contaminations on Magnetic Disks/Heads

Instruments
Air Sampler	Nuclear Magnetic Resonance Spectroscopy	Inductively Coupled Plasma/Mass Spectrometry	Surface Scanner Particle Counter (SurfScan Particle Counter)
Atomic Force Microscopy	Focused Ion Beam	Ion Chromatography	Time-of-Flight Secondary Ion Mass Spectroscopy
Auger Electron Spectroscopy	Fourier Transform Infrared Spectroscopy	Liquid Particle Counter	Transmission Electron Microscopy
Electron Dispersive X-Ray Spectroscopy	Gas Chromatography/Mass Spectroscopy	Raman Spectroscopy	X-Ray Diffraction
Electron Spectroscopy for Chemical Analysis	High Performance Liquid Chromatography	Scanning Electron Microscope	Total Organic Carbon Analyzer

	3. Auger Electron Spectroscopy (AES)
		Determination of trace metal impurities
		Elemental identification

	4. Electron Dispersive X-ray (EDX)
		Compositional analysis for different elements

	5. Electron Spectroscopy for Chemical Analysis (ESCA)
		Chemical bonding information
		Surface elemental identification

	6. F-19 (NMR)
		Polymeric functional group especially for lubricants

	10. High Performance Liquid Chromatography (HPLC)
		Trace organic contamination in aqueous and organic samples
		Identification of high boiling point organic compounds

	11. Inductively Couple Plasma Mass Spectrometry (ICP/MS)
	Using Hewlett Packard model G1822A ICP/MS systems
		Analyzing trace metals on magnetic disks and electronic devices (low PPB)
		Identification of trace inorganics in plating solutions
		Analyzing trace contaminants in semiconductor solvents and extracted electronic components
		DI-Water

	12. Ion Chromatography (IC)
	Using Dionex IC systems DX-500 (for Anions & Cations PPM to PPT levels)
		Semiconductor Solvents
		Semiconductor Acids, Bases, Oxidizing Chemicals
		Extracted from Electronic Devices
		Extracted from Magnetic Disks
		Extracted from Heads
		Extracted from Cleaning Tapes, Brushes
		Lube and Solvents
		Photo Resist
		DI-Water

	13. Liquid Particle Size & Counts Measurements (LPC)
	Using PMS or Hiac Royco systems (0.2 to 300 micron particles) for:
		Heads Extract
		Disk Extract
		Lube
		Corrosive Liquids (acids, bases)
		Oxidizing Chemicals
		Semiconductor Solvents
		Cleanroom's Consumables (Gloves, Masks, Tapes, Wipes, Bags, etc.

	14. Raman Spectroscopy
		Study of surface structure and orbital hybridization

	15. Scanning Electron Microscopy (SEM)
	Using a JEOL 5300-45 Ao resolution
		Magnetic Disks
		Photoresist performance
		Surface evaluations
		Corrosion study

	16. SurfScan Particle Count Size & Mapping (SPC)
	Using KLA Tencor Surface Scan for 6" & 8" Wafers
		Surface Particle Measurment
		Surface Particle Sizing
		Surface Particle Mapping

	17. Time-Of-Flight Secondary Ion Mass Spectroscopy (TOF)
	Using a PHI TFS 2000 High Mass Resolution-High Spatial Resolution TOF SIEM, for 6 & 8 inch sample stage
		TOF is an undisturbed surface analysis for identification of Organic & Inorganic trance contamination

	18. Total Organic Carbon (TOC)
	Using Sivers TOC model 800:
		Disks/Heads
		Cleanroom consumable materials, tape, gloves, etc.
		Aqueous extracted samples

	19. Transmission Electron Microscopy (TEM)
		High resolution imaging of thin films in plan view or cross-section for micro-structural & compositional analysis. Excellent for carbon & heavier elements analysis

	20. X-ray Diffraction (XRD)
		Phase identification
		Measurement of average crystallite size & orientation
		Thin film thickness density